Electromechanical Modeling and Simulation of MEMS-Based Piezoelectric Vibration Energy Harvesting Device Using PZT-5H Material
نویسندگان
چکیده
In this study, we describe the operation of piezoelectric energy converters and electromechanical modeling harvesting (PEH) devices based on microelectromechanical systems (MEMS) for low-power sensors. Consideration is given to a harvester standard MEMS. The parameters are determined optimized using simple MEMS cantilever model. On top Brass substrate, model uses single layer material. We utilized finite element method (FEM) models created with software tools NanoHUB COMSOL analyze behavior MEMS-based devices. was applied predict modal harmonic response PEH By analysis, resonant frequencies 182 Hz FEM PZT-5H device through COMSOL. simulated can provide voltage between 1.7 1.9 mV, 0.074 µW output power. produced power may be increased by connecting layers in parallel series. And Internet Things (IoT) sensors might driven array
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ژورنال
عنوان ژورنال: The University of Danang - Journal of Science and Technology
سال: 2023
ISSN: ['1859-1531']
DOI: https://doi.org/10.31130/ud-jst.2023.340ict